Dedicated Products for ZEISS FE-SEMs
SEM-AFM
SEM AFM

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Fully Integrated SEM-AFM Combination
Highest Performance:
  • SEM guided positioning of AFM tip to area of interest
  • all AFM modes available
  • anchored stage technology for ultra high stability and low drift
Ease of use:
  • one software interface to operate AFM and SEM
  • automated laser and detector alignment
Flexibility:
  • sample scanner setup with 9 µm or 25 µm scan range
  • sample size up to 10 mm
Versatility:
Further information:

Sample Transfer Shuttle




Sample Transfer Shuttle

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Protect your sample from air exposure
Highest Performance:
  • safe and easy transfer of delicate samples between the SEM and the facilities for sample storage and preparation, e.g. a glovebox or glove bag.
Ease of use:
  • infrared remote control for opening and closing the Sample Transfer Shuttle
Flexibility:
  • Shuttle chamber can be filled with an inert gas atmosphere or pumped to vaccum by a manual valve
  • Samples can be mounted either to standard SEM sample plugs (max. sample size 10 mm x 10 mm x 2 mm) or to the provided transferable holder, also used in the SEM-AFM (max. sample size 10 mm x 10 mm x 6 mm).
Versatility:
  • Protection for batteries, fuel cells, thin or etched films, organic electronics, some sort of semiconductors, hydrophilic crystals and many more, i.e. all air sensitive samples which should be protected from influences like oxidation, corrosion, moisture, or contamination
Further information:

High Precision Stage




High Precision Stage

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Position your sample with submicron precision
Highest Performance:
  • Navigate the sample more precise over large distances
  • Increase speed, resolution and decrease data volume

Ease of use:
  • Operate the high precision stage the same way as the standard ZEISS stage

Flexibility:
  • Carry out automated, multidetector analysis
  • Find and refind procedures can be carried out with much higher reliability

Versatility:
  • Correlative Measurement Software

Further information: